Programmable via using indirectly heated phase-change switch for reconfigurable logic applications

Ku N. Chen, L. Krusin-Elbaum, D. M. Newns, B. G. Elmegreen, R. Cheek, N. Rana, A. M. Young, S. J. Koester, C. Lam

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

A novel concept for a programmable via using an indirectly heated phase-change switch is proposed and fabricated successfully. In this device concept, circuits associated with the programmable via are decoupled from the configuration circuits by using an independently contacted heater electrode. We demonstrate the prototype device in a standard 180-nm CMOS copper back-end technology.

Original languageEnglish (US)
Pages (from-to)131-133
Number of pages3
JournalIEEE Electron Device Letters
Volume29
Issue number1
DOIs
StatePublished - Jan 1 2008

Keywords

  • Phase change
  • Programmable
  • Reconfigurable
  • Via

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