Processing and characterization of piezoelectric materials and integration into microelectromechanical systems

Dennis L. Polla, Lorraine F. Francis

Research output: Contribution to journalArticlepeer-review

264 Scopus citations

Fingerprint

Dive into the research topics of 'Processing and characterization of piezoelectric materials and integration into microelectromechanical systems'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds