Processing and characterization of piezoelectric materials and integration into microelectromechanical systems

Dennis L. Polla, Lorraine F. Francis

Research output: Contribution to journalArticle

256 Scopus citations

Abstract

Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Thin-film materials selection and processing routes are reviewed. Some recent and emerging applications of piezoelectric MEMS are presented including acoustic emission microsensors, vibration monitors, molecular recognition biosensors, precision positioners, micropumps, and linear stepper motors.

Original languageEnglish (US)
Pages (from-to)563-597
Number of pages35
JournalAnnual Review of Materials Science
Volume28
Issue number1
DOIs
StatePublished - Jan 1 1998

Keywords

  • Actuators
  • Ferroelectric
  • MEMS
  • Sensors

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