Preparation of hollow hafnium oxide microneedles for transdermal drug delivery

Yong Hua Zhang, Stephen A. Campbell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Transdermal drug delivery is an important approach due to its advantages of controlled release, easy wiping off, high safety and low degree of side effects. However, the efficiency and success of the drug delivery method is seriously hampered by the incapacity of many drugs to cross the skin at therapeutically useful rates. A microneedle approach can dramatically promote transdermal delivery, especially for macromolecules. In this paper, a fabrication process for hollow hafnium oxide microneedles on silicon wafer using only one mask has been developed. Photoresist is spun on a 4″ silicon (100) wafer and patterned by a mask. Deep reactive ion etching is used to form deep molds inside the wafer. A hafnium oxide film is deposited by atomic layer deposition to cover the top side of the wafer and the inside walls of the molds. Then the back side of silicon wafer is etched by a 30 wt.% KOH solution until exposed hollow hafnium oxide microneedles are obtained. Compared to the processes that have been developed for silicon, silicon oxide, or polymer microneedles, the process presented here is simpler, and the strength and flexibility of hollow hafnium oxide microneedles can be easily adjusted by modifying the depositing time of hafnium oxide films. Hafnium oxide microneedles have potential applications in transdermal drug delivery.

Original languageEnglish (US)
Title of host publicationProceedings - 2016 9th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1756-1760
Number of pages5
ISBN (Electronic)9781509037100
DOIs
StatePublished - Feb 13 2017
Event9th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2016 - Datong, China
Duration: Oct 15 2016Oct 17 2016

Publication series

NameProceedings - 2016 9th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2016

Other

Other9th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2016
CountryChina
CityDatong
Period10/15/1610/17/16

Keywords

  • atomic layer deposition
  • hafnium oxide
  • micro-electromechanical systems
  • micromachining
  • microneedle
  • transdermal drug delivery

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