Predicting air flow patterns and particle contamination in clean rooms

Keyphrases

• Airflow Pattern 100%
• Cleanroom 100%
• Particle Contamination 100%
• Flow Transport 100%
• Particle Transport 50%
• Operating Conditions 50%
• Microelectronics 50%
• Submicron Particles 50%
• Manufacturing Operations 50%
• Contamination Control 50%
• Particle Transport Simulation 50%
• Manufacturing Environment 50%
• Numerical Flow 50%
• Clean Environment 50%
• Microelectronics Manufacturing 50%

Engineering

• Airflow Pattern 100%
• Microelectronics 100%
• Clean Rooms 100%
• Sized Particle 50%
• Feature Size 50%
• Design and Environment 50%