Abstract
A silicon-based piezoelectric linear stepper motor has been designed and fabricated. The motor is based on an inertial drive concept derived from sequential electrostatic clamping and unclamping of a piezoelectric bar measuring 38.1 × 6.36 × 0.787 mm. The piezoelectric micromotor has been constructed and tested for precision surgical applications. The measured performance is dependent on the operating conditions selected. Representative performance is a speed of 1.2 mm/s against a 3.0 N load. The motor is limited in its travel by approximately the diameter of the silicon wafer used to fabricated it. The resolution of the motor is less than 100 nm in its most precise actuation mode.
Original language | English (US) |
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Title of host publication | 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings |
Editors | Andre Dittmar, David Beebe |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 180-183 |
Number of pages | 4 |
ISBN (Electronic) | 0780366034, 9780780366039 |
DOIs | |
State | Published - 2000 |
Event | 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000 - Lyon, France Duration: Oct 12 2000 → Oct 14 2000 |
Publication series
Name | 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings |
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Other
Other | 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000 |
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Country/Territory | France |
City | Lyon |
Period | 10/12/00 → 10/14/00 |
Bibliographical note
Publisher Copyright:© 2000 IEEE.