Precision micromotor for surgery

D. Polla, A. Erdman, D. Peichel, R. Rizq, Y. Gao, D. Markus

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

A silicon-based piezoelectric linear stepper motor has been designed and fabricated. The motor is based on an inertial drive concept derived from sequential electrostatic clamping and unclamping of a piezoelectric bar measuring 38.1 × 6.36 × 0.787 mm. The piezoelectric micromotor has been constructed and tested for precision surgical applications. The measured performance is dependent on the operating conditions selected. Representative performance is a speed of 1.2 mm/s against a 3.0 N load. The motor is limited in its travel by approximately the diameter of the silicon wafer used to fabricated it. The resolution of the motor is less than 100 nm in its most precise actuation mode.

Original languageEnglish (US)
Title of host publication1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
EditorsAndre Dittmar, David Beebe
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages180-183
Number of pages4
ISBN (Electronic)0780366034, 9780780366039
DOIs
StatePublished - Jan 1 2000
Event1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000 - Lyon, France
Duration: Oct 12 2000Oct 14 2000

Publication series

Name1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Other

Other1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000
CountryFrance
CityLyon
Period10/12/0010/14/00

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