Polymer tunneling vibration sensors using hot embossing technique

Jungyoon Kim, Tianyi Zhang, Peng Zhou, Quan Guan, Yingming Xu, John Sartori, Lauren Linderman, Vuk Mandic, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


This paper presents acoustic wave detection and analysis with a polymer tunneling sensor fabricated by hot embossing. First, the tunneling sensor is used to detect the acoustic wave generated by a PZT disk. The frequency response of the tunneling sensor is measured by a piezoelectric transducer and laser vibrometer to find the resonance frequency. Next, the performance of the sensor is characterized by measuring the acoustic wave at its resonance frequency. Second, the noise and acceleration amplitude spectral densities of the tunneling sensor are calculated using Fast Fourier Transform (FFT) based on experimental data, proven to be a very effective way to analyze the polymer tunneling sensor. The testing results of the fabricated polymer tunneling vibration sensor are compared with a commercial piezoelectric accelerometer. The results demonstrate that the polymer tunneling vibration sensor exactly follows the response of the commercial accelerometer.

Original languageEnglish (US)
Article number113705
JournalSensors and Actuators A: Physical
StatePublished - Sep 1 2022

Bibliographical note

Funding Information:
Funding for this project was partially provided by supported by MnDRIVE: Minnesota’s Discovery, Research, and InnoVation Economy . Portions of this work were conducted in the Minnesota Nano Center, which is supported by the National Science Foundation through the National Nano Coordinated Infrastructure Network (NNCI) under Award Number ECCS-1542202 .

Publisher Copyright:
© 2022 Elsevier B.V.


  • Accelerometer
  • Acoustic wave
  • FFT
  • Hot embossing
  • PMMA
  • PZT
  • Tunneling current


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