Polymer-sandwiched ultra-thin silicon(100) layer for flexible electronics

Yong Hua Zhang, Stephen A. Campbell, Liyuan Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


Flexible electronics has gained increasing attention for biomedical engineering applications, solar cell and so on. In this paper, an SU-8/silicon(100)/SU-8 flexible composite sandwich structure is studied. Besides preventing corrosion to the underneath thin silicon membrane, SU-8 photoresist coated on the silicon membrane improves its flexibility as shown by a finite element (FE) simulation utilizing ANSYS software. Using plasma enhanced chemical vapor deposited SiO2/Si3N4 composite film as an etching mask, a 4" silicon(100) wafer was thinned to 26μm without rupture in a 30 wt.% KOH solution. The thinned wafer was coated on both sides with 20μm of SU-8 photoresist and cut into strips. And then the strips were bent by a caliper to measure its radius of curvature. A sector model of bending deformation was adopted to estimate the radius of curvature. The determined minimal bending radius of the polymer-sandwiched ultra-thin silicon layer is no more than 3.3mm. The polymer-sandwiched ultra-thin silicon(100) layer can be used as a flexible substrate. And the fabrication of this sandwich structure is compatible with conventional microelectronic fabrication processing. It can be used as a post-fabrication process for high performance flexible electronics.

Original languageEnglish (US)
Title of host publicationProceedings - 2015 8th International Conference on BioMedical Engineering and Informatics, BMEI 2015
EditorsZhiyong Tao, Li Bai, Sen Lin, Jinguang Sun, Lipo Wang, Liangshan Shao
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages5
ISBN (Electronic)9781509000227
StatePublished - Feb 8 2016
Event8th International Conference on BioMedical Engineering and Informatics, BMEI 2015 - Shenyang, China
Duration: Oct 14 2015Oct 16 2015


Other8th International Conference on BioMedical Engineering and Informatics, BMEI 2015


  • SU-8 photoresist
  • bulk silicon (100)
  • flexible electronic technology
  • micro-electro-mechanical systems
  • sandwich structure

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