Polymer magnetic microactuators fabricated with hot embossing and layer-by-layer nano self-assembly

Keyphrases

• Nanoassemblies 100%
• Hot Embossing 100%
• Magnetic Microactuator 100%
• Poly(methyl methacrylate) 66%
• Silicon Mold 66%
• Deflection Amplitude 66%
• Polymer-based 33%
• Magnetic Field 33%
• Actuator 33%
• Magnetic Properties 33%
• Mechanical Properties 33%
• Room Temperature 33%
• Magnetic Materials 33%
• Magnetic Films 33%
• Pattern Transfer 33%
• Etching Process 33%
• Self-assembly Method 33%
• Sacrificial Layer 33%
• Electrical Properties 33%
• Processing Time 33%
• Gold Electrode 33%
• Theoretical Formula 33%
• Fe2O3 Nanoparticles 33%
• Magnetic Iron Oxide 33%
• Wet Etching 33%
• Shortest Processing Time 33%
• Natural Frequency 33%
• Simple Fabrication 33%
• Iron Oxide Layer 33%
• Laser Interferometer 33%
• Positive Photoresist 33%
• UV Lithography 33%
• Maximum Deflection 33%
• Low-cost Device 33%
• Microactuators 33%
• All-frequency 33%

Engineering

• Processing Time 100%
• Nanoparticles 50%
• Optical Lithography 50%
• Back Side 50%
• Self-Assembly Technique 50%
• Oxide Layer 50%
• Pattern Transfer 50%
• Laser Interferometer 50%
• Room Temperature 50%
• Magnetic Field 50%
• Photoresist 50%
• Resonant Frequency 50%

Material Science

• Magnetic Polymer 100%
• Self Assembly 100%
• Silicon 66%
• Iron Oxide 66%
• Lithography 33%
• Actuator 33%
• Magnetic Property 33%
• Wet Etching 33%
• Interferometer 33%
• Surface (Surface Science) 33%
• Nanoparticle 33%
• Magnetic Film 33%
• Magnetic Material 33%