Polymer-based wide-bandwidth and high-sensitivity micromachined electron tunneling accelerometers using hot embossing

Keyphrases

• Accelerometer 33%
• Circuit Board 33%
• Combinative 33%
• Deflection 33%
• Electron Tunneling 100%
• Etching Process 33%
• Exponential Relationship 33%
• Feedback System 33%
• High Sensitivity 100%
• Hot Embossing 100%
• Measuring Circuit 33%
• Micromachining 100%
• Natural Frequency 33%
• Plasma Dry Etching 33%
• Polymer-based 100%
• Sidewall 33%
• Silicon Mold 66%
• Smooth Surface 33%
• Tunneling Accelerometer 100%
• Tunneling Barrier Width 33%
• Wide Bandwidth 100%

Material Science

• Accelerometer 100%
• Electronic Circuit 33%
• Plasma Etching 33%
• Poly Methyl Methacrylate 66%
• Silicon 66%

Engineering

• Anisotropic 33%
• Barrier Height 33%
• Dry Etching 33%
• Natural Frequency 33%
• Side Wall 33%
• Smooth Surface 33%
• Tunnel Construction 100%