Polarization-modulated attenuated total-internal reflection infrared spectroscopic study of surfaces: An application to the aging of oxide films on silicon plates

Kerin Scanlon, Richard J. Kvitek, Suellen F. Schulthesz, John F. Evans, John Overend

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

A technique of polarization-modulated ATR infrared spectroscopy has been developed for the study of surface species. This technique, which appears to be more sensitive than conventional ATR techniques, has been used to study the aging of oxide films on single-crystal silicon surfaces.

Original languageEnglish (US)
Pages (from-to)730-731
Number of pages2
JournalJournal of Physical Chemistry
Volume87
Issue number5
DOIs
StatePublished - Jan 1 1983

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