Polarization-modulated attenuated total-internal reflection infrared spectroscopic study of surfaces: An application to the aging of oxide films on silicon plates

Kerin Scanlon; Richard J. Kvitek; Suellen F. Schulthesz; John F. Evans; John Overend

doi:10.1021/j100228a006

Polarization-modulated attenuated total-internal reflection infrared spectroscopic study of surfaces: An application to the aging of oxide films on silicon plates

Kerin Scanlon, Richard J. Kvitek, Suellen F. Schulthesz, John F. Evans, John Overend

Chemistry & Biochemistry

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Abstract

A technique of polarization-modulated ATR infrared spectroscopy has been developed for the study of surface species. This technique, which appears to be more sensitive than conventional ATR techniques, has been used to study the aging of oxide films on single-crystal silicon surfaces.

Original language	English (US)
Pages (from-to)	730-731
Number of pages	2
Journal	Journal of Physical Chemistry
Volume	87
Issue number	5
DOIs	https://doi.org/10.1021/j100228a006
State	Published - Jan 1 1983

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10.1021/j100228a006

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Polarization-modulated attenuated total-internal reflection infrared spectroscopic study of surfaces: An application to the aging of oxide films on silicon plates. / Scanlon, Kerin; Kvitek, Richard J.; Schulthesz, Suellen F. et al.
In: Journal of Physical Chemistry, Vol. 87, No. 5, 01.01.1983, p. 730-731.

Research output: Contribution to journal › Article › peer-review

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title = "Polarization-modulated attenuated total-internal reflection infrared spectroscopic study of surfaces: An application to the aging of oxide films on silicon plates",

abstract = "A technique of polarization-modulated ATR infrared spectroscopy has been developed for the study of surface species. This technique, which appears to be more sensitive than conventional ATR techniques, has been used to study the aging of oxide films on single-crystal silicon surfaces.",

author = "Kerin Scanlon and Kvitek, {Richard J.} and Schulthesz, {Suellen F.} and Evans, {John F.} and John Overend",

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AU - Evans, John F.

AU - Overend, John

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Polarization-modulated attenuated total-internal reflection infrared spectroscopic study of surfaces: An application to the aging of oxide films on silicon plates

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