Polarity-switching top coats for silicon-containing block copolymer orientation control

  • Christopher M. Bates
  • , Michael J. Maher
  • , Anthony Thio
  • , Leon M. Dean
  • , Julia D. Cushen
  • , William J. Durand
  • , Greg Blachut
  • , Litan Li
  • , Christopher J. Ellison
  • , C. Grant Willson

Research output: Contribution to journalComment/debatepeer-review

3 Scopus citations
Original languageEnglish (US)
Pages (from-to)223-224
Number of pages2
JournalJournal of Photopolymer Science and Technology
Volume26
Issue number2
DOIs
StatePublished - 2013

Keywords

  • Block copolymer
  • Directed self-assembly
  • Thermal annealing
  • Top coat

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