@article{0af1ccbc293241fdbb86f0f0ce2d40f2,
title = "Polarity-switching top coats for silicon-containing block copolymer orientation control",
keywords = "Block copolymer, Directed self-assembly, Thermal annealing, Top coat",
author = "Bates, {Christopher M.} and Maher, {Michael J.} and Anthony Thio and Dean, {Leon M.} and Cushen, {Julia D.} and Durand, {William J.} and Greg Blachut and Litan Li and Ellison, {Christopher J.} and Willson, {C. Grant}",
year = "2013",
doi = "10.2494/photopolymer.26.223",
language = "English (US)",
volume = "26",
pages = "223--224",
journal = "Journal of Photopolymer Science and Technology",
issn = "0914-9244",
publisher = "Tokai University",
number = "2",
}