Polarity-switching top coats for silicon-containing block copolymer orientation control

Christopher M. Bates, Michael J. Maher, Anthony Thio, Leon M. Dean, Julia D. Cushen, William J. Durand, Greg Blachut, Litan Li, Christopher J. Ellison, C. Grant Willson

Research output: Contribution to journalComment/debate

3 Scopus citations
Original languageEnglish (US)
Pages (from-to)223-224
Number of pages2
JournalJournal of Photopolymer Science and Technology
Volume26
Issue number2
DOIs
StatePublished - Aug 20 2013

Keywords

  • Block copolymer
  • Directed self-assembly
  • Thermal annealing
  • Top coat

Cite this

Bates, C. M., Maher, M. J., Thio, A., Dean, L. M., Cushen, J. D., Durand, W. J., Blachut, G., Li, L., Ellison, C. J., & Willson, C. G. (2013). Polarity-switching top coats for silicon-containing block copolymer orientation control. Journal of Photopolymer Science and Technology, 26(2), 223-224. https://doi.org/10.2494/photopolymer.26.223