Plasmonic nanocomposites of zinc oxide and titanium nitride

Chad A. Beaudette; Jacob T. Held; Benjamin L. Greenberg; Phong H. Nguyen; Nolan M. Concannon; Russell J. Holmes; K. Andre Mkhoyan; Eray S. Aydil; Uwe R. Kortshagen

doi:10.1116/1.5142858

Plasmonic nanocomposites of zinc oxide and titanium nitride

Chad A. Beaudette, Jacob T. Held, Benjamin L. Greenberg, Phong H. Nguyen, Nolan M. Concannon, Russell J. Holmes, K. Andre Mkhoyan, Eray S. Aydil, Uwe R. Kortshagen

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The authors produce plasmonic ZnO-TiN nanocomposite films by depositing plasma-synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal network's pores with TiN via remote plasma-enhanced atomic layer deposition (PEALD). This ZnO-TiN nanocomposite exhibits a plasmonic resonance that is blueshifted compared to planar titanium nitride thin films. The authors study the effects of PEALD conditions and the ZnO film thickness on the plasmonic response of these nanocomposites and exploit the optimized film in a device that generates photocurrent at zero bias.

Original language	English (US)
Article number	042404
Pages (from-to)	042404
Journal	Journal of Vacuum Science and Technology A
Volume	38
Issue number	4
DOIs	https://doi.org/10.1116/1.5142858
State	Published - Jul 1 2020

Bibliographical note

Funding Information:
This project was supported by the MRSEC program of the National Science Foundation under Award No. DMR-1420013 and by the Research Experiences for Undergraduates (REU) Program of the National Science Foundation under Award No. DMR-1852044. STEM, XPS, and ellipsometry were performed in the College of Science and Engineering Characterization Facility of the University of Minnesota, which receives partial support from the NSF through the MRSEC program. Portions of this work were conducted in the Minnesota Nano Center, which is supported by the National Science Foundation through the National Nano Coordinated Infrastructure Network (Award No. NNCI-1542202). N.M.C. acknowledges support from the NSF Graduate Research Fellowship under Grant No. 00074041. The authors thank T. L. Senkow for her assistance in editing the manuscript. The authors are grateful to Ognjen Ilic for advice regarding the Mie scattering calculations.

Publisher Copyright:
© 2020 Author(s).

MRSEC Support

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10.1116/1.5142858

http://avs.scitation.org/doi/10.1116/1.5142858

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REU Site: Science and Engineering in Nanomaterials
Blank, D. A. (PI)
THE NATIONAL SCIENCE FOUNDATION
4/1/19 → 3/31/23
Project: Research project
University of Minnesota MRSEC (DMR-1420013)
Lodge, T. P. (PI)
11/1/14 → 10/31/20
Project: Research project
MRSEC IRG-2: Sustainable Nanocrystal Materials
Kortshagen, U. R. (Coordinator), Aydil, E. S. (Senior Investigator), Campbell, S. A. (Senior Investigator), Francis, L. F. (Senior Investigator), Haynes, C. L. (Senior Investigator), Hogan, C. (Senior Investigator), Mkhoyan, A. (Senior Investigator), Shklovskii, B. I. (Senior Investigator) & Wang, X. (Senior Investigator)
11/1/14 → 10/31/20
Project: Research project

Cite this

@article{653bb67790624fae80bd76c02da9b803,

title = "Plasmonic nanocomposites of zinc oxide and titanium nitride",

abstract = "The authors produce plasmonic ZnO-TiN nanocomposite films by depositing plasma-synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal network's pores with TiN via remote plasma-enhanced atomic layer deposition (PEALD). This ZnO-TiN nanocomposite exhibits a plasmonic resonance that is blueshifted compared to planar titanium nitride thin films. The authors study the effects of PEALD conditions and the ZnO film thickness on the plasmonic response of these nanocomposites and exploit the optimized film in a device that generates photocurrent at zero bias.",

author = "Beaudette, {Chad A.} and Held, {Jacob T.} and Greenberg, {Benjamin L.} and Nguyen, {Phong H.} and Concannon, {Nolan M.} and Holmes, {Russell J.} and Mkhoyan, {K. Andre} and Aydil, {Eray S.} and Kortshagen, {Uwe R.}",

note = "Funding Information: This project was supported by the MRSEC program of the National Science Foundation under Award No. DMR-1420013 and by the Research Experiences for Undergraduates (REU) Program of the National Science Foundation under Award No. DMR-1852044. STEM, XPS, and ellipsometry were performed in the College of Science and Engineering Characterization Facility of the University of Minnesota, which receives partial support from the NSF through the MRSEC program. Portions of this work were conducted in the Minnesota Nano Center, which is supported by the National Science Foundation through the National Nano Coordinated Infrastructure Network (Award No. NNCI-1542202). N.M.C. acknowledges support from the NSF Graduate Research Fellowship under Grant No. 00074041. The authors thank T. L. Senkow for her assistance in editing the manuscript. The authors are grateful to Ognjen Ilic for advice regarding the Mie scattering calculations. Publisher Copyright: {\textcopyright} 2020 Author(s).",

year = "2020",

month = jul,

day = "1",

doi = "10.1116/1.5142858",

language = "English (US)",

volume = "38",

pages = "042404",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Plasmonic nanocomposites of zinc oxide and titanium nitride

AU - Beaudette, Chad A.

AU - Held, Jacob T.

AU - Greenberg, Benjamin L.

AU - Nguyen, Phong H.

AU - Concannon, Nolan M.

AU - Holmes, Russell J.

AU - Mkhoyan, K. Andre

AU - Aydil, Eray S.

AU - Kortshagen, Uwe R.

N1 - Funding Information: This project was supported by the MRSEC program of the National Science Foundation under Award No. DMR-1420013 and by the Research Experiences for Undergraduates (REU) Program of the National Science Foundation under Award No. DMR-1852044. STEM, XPS, and ellipsometry were performed in the College of Science and Engineering Characterization Facility of the University of Minnesota, which receives partial support from the NSF through the MRSEC program. Portions of this work were conducted in the Minnesota Nano Center, which is supported by the National Science Foundation through the National Nano Coordinated Infrastructure Network (Award No. NNCI-1542202). N.M.C. acknowledges support from the NSF Graduate Research Fellowship under Grant No. 00074041. The authors thank T. L. Senkow for her assistance in editing the manuscript. The authors are grateful to Ognjen Ilic for advice regarding the Mie scattering calculations. Publisher Copyright: © 2020 Author(s).

PY - 2020/7/1

Y1 - 2020/7/1

N2 - The authors produce plasmonic ZnO-TiN nanocomposite films by depositing plasma-synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal network's pores with TiN via remote plasma-enhanced atomic layer deposition (PEALD). This ZnO-TiN nanocomposite exhibits a plasmonic resonance that is blueshifted compared to planar titanium nitride thin films. The authors study the effects of PEALD conditions and the ZnO film thickness on the plasmonic response of these nanocomposites and exploit the optimized film in a device that generates photocurrent at zero bias.

AB - The authors produce plasmonic ZnO-TiN nanocomposite films by depositing plasma-synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal network's pores with TiN via remote plasma-enhanced atomic layer deposition (PEALD). This ZnO-TiN nanocomposite exhibits a plasmonic resonance that is blueshifted compared to planar titanium nitride thin films. The authors study the effects of PEALD conditions and the ZnO film thickness on the plasmonic response of these nanocomposites and exploit the optimized film in a device that generates photocurrent at zero bias.

U2 - 10.1116/1.5142858

DO - 10.1116/1.5142858

M3 - Article

SN - 0734-2101

VL - 38

SP - 042404

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

IS - 4

M1 - 042404

ER -

Plasmonic nanocomposites of zinc oxide and titanium nitride

Abstract

Bibliographical note

MRSEC Support

Publisher link

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Projects

REU Site: Science and Engineering in Nanomaterials

University of Minnesota MRSEC (DMR-1420013)

MRSEC IRG-2: Sustainable Nanocrystal Materials

Cite this