Abstract
Sensor arrays are being developed to determine the friction distribution of the die (metal-working tool)-work material interface during metal forming operations. The basic element of the sensors are thin films of piezoelectric ZnO and AlN. Normal (compressive) stress sensors use films having their C-axis normal to their interface and shear-stress sensors use films having their C-axis ideally (for zero compressional stress response) inclined at 40° to the interface normal. The details of the RF-diode sputter deposition of the films and the characterization of the piezoelectric properties of the films are described. A prototype multi-element normal stress sensor having 125-μm feature size has been fabricated on a silicon wafer, and preliminary test results are described.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1191-1195 |
| Number of pages | 5 |
| Journal | Ultrasonics Symposium Proceedings |
| Volume | 2 |
| State | Published - 1989 |
| Event | IEEE 1989 Ultrasonics Symposium - Montreal, Que, Can Duration: Oct 3 1989 → Oct 6 1989 |