Piezoelectric thin film stress sensors for metal-forming operations

Ty Fayfield, Vernon Scott, W. P. Robbins, S. Ramalingam, B. Klamacki, Maocheng Li

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


Sensor arrays are being developed to determine the friction distribution of the die (metal-working tool)-work material interface during metal forming operations. The basic element of the sensors are thin films of piezoelectric ZnO and AlN. Normal (compressive) stress sensors use films having their C-axis normal to their interface and shear-stress sensors use films having their C-axis ideally (for zero compressional stress response) inclined at 40° to the interface normal. The details of the RF-diode sputter deposition of the films and the characterization of the piezoelectric properties of the films are described. A prototype multi-element normal stress sensor having 125-μm feature size has been fabricated on a silicon wafer, and preliminary test results are described.

Original languageEnglish (US)
Pages (from-to)1191-1195
Number of pages5
JournalUltrasonics Symposium Proceedings
StatePublished - 1989
EventIEEE 1989 Ultrasonics Symposium - Montreal, Que, Can
Duration: Oct 3 1989Oct 6 1989


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