Piezoelectric scanners for atomic force microscopes: Design of lateral sensors, identification and control

A. Daniele, S. Salapaka, M. V. Salapaka, M. Dahleh

Research output: Contribution to journalConference article

82 Scopus citations

Abstract

This paper presents the identification and control of piezoelectric positioners used in atomic force microscopes (AFM) with the goal of improving probe positioning on the sample surface. A novel sensor was developed for this task and employed to infer a sixth order linear two input two output model of the piezo's lateral dynamics. The piezo model was used to design a controller for tracking reference signals common in AFM operation. The controller and sensor were shown to significantly improve the microscope's ability to position the probe on the sample's surface, enabling the AFM user to precisely scan areas on a surface based on images from previous Scans.

Original languageEnglish (US)
Pages (from-to)253-257
Number of pages5
JournalProceedings of the American Control Conference
Volume1
StatePublished - Dec 1 1999
EventProceedings of the 1999 American Control Conference (99ACC) - San Diego, CA, USA
Duration: Jun 2 1999Jun 4 1999

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