Piezoelectric properties and acoustic wave detection of Pb(Zr_0.52Ti_0.48)O₃ thin films for microelectromechanical systems sensor

Keyphrases

• Piezoelectric Properties 100%
• PZT Film 100%
• Pb(Zr,Ti)O3 100%
• Acoustic Wave Detection 100%
• Microelectromechanical Sensors 100%
• Hysteresis Loop 66%
• Perovskite 33%
• Sensor Applications 33%
• Wave Propagation 33%
• Bias Voltage 33%
• Si Substrate 33%
• DC Bias 33%
• Sol-gel Method 33%
• Acoustic Emission Sensor 33%
• Michelson Interferometer 33%
• Charge Amplifier 33%
• Increased Reliability 33%
• Ferroelectric Polarization 33%
• Pt-TiO2 33%
• Piezoelectric Coefficient 33%
• Polarization Field 33%
• TiO2-SiO2 33%
• Poled Film 33%
• Piezoelectric Hysteresis 33%
• Acoustic Emission Waves 33%

Engineering

• Piezoelectric 100%
• Thin Films 100%
• Microelectromechanical System Sensor 100%
• Hysteresis Loop 66%
• Acoustic Emission 66%
• Electric Field 33%
• Si Substrate 33%
• Bias Voltage 33%
• Application of Sensors 33%
• Michelson Interferometer 33%
• Charge Amplifier 33%
• Piezoelectric Coefficient 33%

Material Science

• Microelectromechanical System 100%
• Film 100%
• Piezoelectric Property 100%
• Thin Films 100%
• Piezoelectricity 60%
• Ferroelectric Material 40%
• Sol-Gel 20%
• Titanium Dioxide 20%
• Interferometer 20%