Keyphrases
Microsensor
100%
PZT Thin Films
100%
Piezoelectric Microcantilever
100%
Thin-film Element
100%
Microactuators
100%
Microcantilever
66%
Actuation
66%
Bimorph
66%
Two-segment
66%
Piezoelectric Cantilever
66%
Electric
33%
Technology Platform
33%
Cantilever
33%
Sensing Resolution
33%
Displacement Force
33%
System Control
33%
Piezoelectric Film
33%
Vibration Control
33%
Cantilever Structure
33%
Metal Electrode
33%
Silicon Cantilever
33%
Actuation Force
33%
Flexible Manipulator
33%
Bulk Micromachining
33%
Piezoelectric Element
33%
Micromanipulation System
33%
PZT Film
33%
Microrobot Control
33%
Bimorph piezoelectric Cantilever
33%
Piezoelectric Charges
33%
Piezoelectric Actuation
33%
Platform-Based
33%
Engineering
Microsensor
100%
Piezoelectric
100%
Microcantilevers
100%
Thin Films
100%
Actuation
22%
Manipulator
11%
Potential Application
11%
Vibration Control
11%
Force Displacement
11%
Actuation Force
11%
Micro Machining
11%
Piezoelectric Element
11%
Micromanipulation
11%
Microrobots
11%
Material Science
Piezoelectricity
100%
Microsensor
100%
Thin Films
100%
Film
20%
Silicon
10%
Micromachining
10%