Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators

Liu Mengwei, Cui Tianhong, Dong Weijie, Cui Yan, Wang Jing, Du Liqun, Wang Liding

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

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Keyphrases

Engineering

Material Science