Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators

Liu Mengwei; Cui Tianhong; Dong Weijie; Cui Yan; Wang Jing; Du Liqun; Wang Liding

doi:10.1109/NEMS.2006.334893

Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators

Liu Mengwei, Cui Tianhong, Dong Weijie, Cui Yan, Wang Jing, Du Liqun, Wang Liding

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

Different from the conventional piezoelectric microcantilevers with a piezoelectric film sandwiched between two metal electrodes on cantilever structures, the objective of our investigation is to develop a technology platform based on the integration of two piezoelectric PZT thin-film elements on silicon cantilevers for microsensors and microactuators. Two novel piezoelectric microcantilevers with two piezoelectric elements (bimorph or two segments of PZT films) and three electric electrodes were designed. The microcantilevers were successfully fabricated by bulk micromachining. The generated piezoelectric charge and actuation force of the microcantilevers were characterized. As microsensors or microactuators, the bimorph piezoelectric cantilevers can increase the sensing resolution and actuation displacement (force) of the piezoelectric cantilevers. The bimorph and two-segment piezoelectric cantilevers can be served as the versatile devices for sensing and actuation. The multifunctional cantilevers have many potential applications in fields such as micromanipulation systems, microrobots, and vibration controls of flexible manipulators.

Original language	English (US)
Title of host publication	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages	775-778
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2006.334893
State	Published - 2006
Event	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China Duration: Jan 18 2006 → Jan 21 2006

Publication series

Name	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Other

Other	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Country/Territory	China
City	Zhuhai
Period	1/18/06 → 1/21/06

Keywords

MEMS
Microactuator
Microsensor
PZT thin film
Piezoelectric microcantilever

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Publisher link

10.1109/NEMS.2006.334893

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Mengwei, L., Tianhong, C., Weijie, D., Yan, C., Jing, W., Liqun, D., & Liding, W. (2006). Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 775-778). Article 4135066 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). https://doi.org/10.1109/NEMS.2006.334893

Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators. / Mengwei, Liu; Tianhong, Cui; Weijie, Dong et al.
Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 775-778 4135066 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mengwei, L, Tianhong, C, Weijie, D, Yan, C, Jing, W, Liqun, D & Liding, W 2006, Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators. in Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS., 4135066, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, pp. 775-778, 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, 1/18/06. https://doi.org/10.1109/NEMS.2006.334893

Mengwei L, Tianhong C, Weijie D, Yan C, Jing W, Liqun D et al. Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 775-778. 4135066. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). doi: 10.1109/NEMS.2006.334893

Mengwei, Liu ; Tianhong, Cui ; Weijie, Dong et al. / Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators. Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. pp. 775-778 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

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AU - Jing, Wang

AU - Liqun, Du

AU - Liding, Wang

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AB - Different from the conventional piezoelectric microcantilevers with a piezoelectric film sandwiched between two metal electrodes on cantilever structures, the objective of our investigation is to develop a technology platform based on the integration of two piezoelectric PZT thin-film elements on silicon cantilevers for microsensors and microactuators. Two novel piezoelectric microcantilevers with two piezoelectric elements (bimorph or two segments of PZT films) and three electric electrodes were designed. The microcantilevers were successfully fabricated by bulk micromachining. The generated piezoelectric charge and actuation force of the microcantilevers were characterized. As microsensors or microactuators, the bimorph piezoelectric cantilevers can increase the sensing resolution and actuation displacement (force) of the piezoelectric cantilevers. The bimorph and two-segment piezoelectric cantilevers can be served as the versatile devices for sensing and actuation. The multifunctional cantilevers have many potential applications in fields such as micromanipulation systems, microrobots, and vibration controls of flexible manipulators.

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Piezoelectric microcantilevers with Two PZT thin-film elements for microsensors and microactuators

Abstract

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Keywords

UN SDGs

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