Benjamin Y.H. Liu, Kenneth L. Rubow, David Y.H. Pui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations


High efficiency air filters are widely used for particulate contamination control in clean rooms. The performance of the filter is dependent upon the composition of the filter (filter fiber size and packing density), the operating conditions (flow velocity) and the characteristics of aerosol particles (size distribution and shape). This paper discusses the influence of these parameters on the performance of modern HEPA and ULPA filters. Data are presented showing the measured efficiency of the filters as a function of particle size and flow velocity. The significance of the results in terms of filter testing and evaluation requirements are discussed. (Author abstract. )

Original languageEnglish (US)
Title of host publicationProceedings, Annual Technical Meeting - Institute of Environmental Sciences
PublisherInst of Environmental Sciences
Number of pages4
ISBN (Print)0915414252
StatePublished - Jan 1 1985

Publication series

NameProceedings, Annual Technical Meeting - Institute of Environmental Sciences
ISSN (Print)0073-9227


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