Performance enhancement of on-chip inductors with permalloy magnetic rings

Wei Xu; Saurabh Sinha; Tawab Dastagir; Hao Wu; Bertan Bakkaloglu; Donald S. Gardner; Yu Cao; Hongbin Yu

doi:10.1109/LED.2010.2089779

Performance enhancement of on-chip inductors with permalloy magnetic rings

Wei Xu
, Saurabh Sinha
, Tawab Dastagir
, Hao Wu
, Bertan Bakkaloglu
, Donald S. Gardner
, Yu Cao
, Hongbin Yu

Research output: Contribution to journal › Article › peer-review

54 Scopus citations

Abstract

We demonstrate spiral inductors with continuous Permalloy ring structure at 100-μm scale, which achieve enhancements of sixfold in inductance and threefold in quality factor at frequencies as high as 200 MHz. The roll-off frequency is due to the eddy current loss in the conductive magnetic material. To reduce such loss and tune the permeability, the Permalloy film is laminated and split into bars. The dependence of the inductance and quality factor on permeability is further investigated. Different types of spiral inductors were fabricated with magnetic rings, helping shed light on optimization strategy.

Original language	English (US)
Article number	5660072
Pages (from-to)	69-71
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	32
Issue number	1
DOIs	https://doi.org/10.1109/LED.2010.2089779
State	Published - Jan 2011
Externally published	Yes

Bibliographical note

Funding Information:
Manuscript received September 17, 2010; revised September 30, 2010; accepted October 17, 2010. Date of publication December 10, 2010; date of current version December 27, 2010. This work was supported in part by the National Science Foundation under Grant 0727100. The review of this letter was arranged by Editor A. Z. Wang. W. Xu, S. Sinha, T. Dastagir, H. Wu, B. Bakkaloglu, Y. Cao, and H. Yu are with the School of Electrical, Computer, and Energy Engineering, Arizona State University Tempe, AZ 85287 USA (e-mail: [email protected]). D. S. Gardner is with Intel Labs, Intel Corp., Santa Clara, CA 95052 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/LED.2010.2089779 Fig. 1. Optical images of the fabricated rectangular and square inductors. (a) Without NiFe (bare). (b) With NiFe thin film enclosed. (c) With patterned NiFe rings. (d) B–H magnetic hysteresis loop of 1-μm laminated NiFe film (50-nm NiFe/5-nm Cr) and layer thickness dependence of permeability measurement. Inset shows schematic of laminated NiFe film. (e) Process flow for on-chip inductor with NiFe.

Keywords

Eddy current
Permalloy
ferromagnetic resonance
inductance density
lamination
magnetic ring
permeability
spiral inductor

Publisher link

10.1109/LED.2010.2089779

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@article{6f33d7e97a2349dcb331a1c234a18bb3,

title = "Performance enhancement of on-chip inductors with permalloy magnetic rings",

abstract = "We demonstrate spiral inductors with continuous Permalloy ring structure at 100-μm scale, which achieve enhancements of sixfold in inductance and threefold in quality factor at frequencies as high as 200 MHz. The roll-off frequency is due to the eddy current loss in the conductive magnetic material. To reduce such loss and tune the permeability, the Permalloy film is laminated and split into bars. The dependence of the inductance and quality factor on permeability is further investigated. Different types of spiral inductors were fabricated with magnetic rings, helping shed light on optimization strategy.",

keywords = "Eddy current, Permalloy, ferromagnetic resonance, inductance density, lamination, magnetic ring, permeability, spiral inductor",

author = "Wei Xu and Saurabh Sinha and Tawab Dastagir and Hao Wu and Bertan Bakkaloglu and Gardner, \{Donald S.\} and Yu Cao and Hongbin Yu",

note = "Funding Information: Manuscript received September 17, 2010; revised September 30, 2010; accepted October 17, 2010. Date of publication December 10, 2010; date of current version December 27, 2010. This work was supported in part by the National Science Foundation under Grant 0727100. The review of this letter was arranged by Editor A. Z. Wang. W. Xu, S. Sinha, T. Dastagir, H. Wu, B. Bakkaloglu, Y. Cao, and H. Yu are with the School of Electrical, Computer, and Energy Engineering, Arizona State University Tempe, AZ 85287 USA (e-mail: [email protected]). D. S. Gardner is with Intel Labs, Intel Corp., Santa Clara, CA 95052 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/LED.2010.2089779 Fig. 1. Optical images of the fabricated rectangular and square inductors. (a) Without NiFe (bare). (b) With NiFe thin film enclosed. (c) With patterned NiFe rings. (d) B–H magnetic hysteresis loop of 1-μm laminated NiFe film (50-nm NiFe/5-nm Cr) and layer thickness dependence of permeability measurement. Inset shows schematic of laminated NiFe film. (e) Process flow for on-chip inductor with NiFe.",

year = "2011",

month = jan,

doi = "10.1109/LED.2010.2089779",

language = "English (US)",

volume = "32",

pages = "69--71",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1",

}

TY - JOUR

T1 - Performance enhancement of on-chip inductors with permalloy magnetic rings

AU - Xu, Wei

AU - Sinha, Saurabh

AU - Dastagir, Tawab

AU - Wu, Hao

AU - Bakkaloglu, Bertan

AU - Gardner, Donald S.

AU - Cao, Yu

AU - Yu, Hongbin

N1 - Funding Information: Manuscript received September 17, 2010; revised September 30, 2010; accepted October 17, 2010. Date of publication December 10, 2010; date of current version December 27, 2010. This work was supported in part by the National Science Foundation under Grant 0727100. The review of this letter was arranged by Editor A. Z. Wang. W. Xu, S. Sinha, T. Dastagir, H. Wu, B. Bakkaloglu, Y. Cao, and H. Yu are with the School of Electrical, Computer, and Energy Engineering, Arizona State University Tempe, AZ 85287 USA (e-mail: [email protected]). D. S. Gardner is with Intel Labs, Intel Corp., Santa Clara, CA 95052 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/LED.2010.2089779 Fig. 1. Optical images of the fabricated rectangular and square inductors. (a) Without NiFe (bare). (b) With NiFe thin film enclosed. (c) With patterned NiFe rings. (d) B–H magnetic hysteresis loop of 1-μm laminated NiFe film (50-nm NiFe/5-nm Cr) and layer thickness dependence of permeability measurement. Inset shows schematic of laminated NiFe film. (e) Process flow for on-chip inductor with NiFe.

PY - 2011/1

Y1 - 2011/1

N2 - We demonstrate spiral inductors with continuous Permalloy ring structure at 100-μm scale, which achieve enhancements of sixfold in inductance and threefold in quality factor at frequencies as high as 200 MHz. The roll-off frequency is due to the eddy current loss in the conductive magnetic material. To reduce such loss and tune the permeability, the Permalloy film is laminated and split into bars. The dependence of the inductance and quality factor on permeability is further investigated. Different types of spiral inductors were fabricated with magnetic rings, helping shed light on optimization strategy.

AB - We demonstrate spiral inductors with continuous Permalloy ring structure at 100-μm scale, which achieve enhancements of sixfold in inductance and threefold in quality factor at frequencies as high as 200 MHz. The roll-off frequency is due to the eddy current loss in the conductive magnetic material. To reduce such loss and tune the permeability, the Permalloy film is laminated and split into bars. The dependence of the inductance and quality factor on permeability is further investigated. Different types of spiral inductors were fabricated with magnetic rings, helping shed light on optimization strategy.

KW - Eddy current

KW - Permalloy

KW - ferromagnetic resonance

KW - inductance density

KW - lamination

KW - magnetic ring

KW - permeability

KW - spiral inductor

UR - https://www.scopus.com/pages/publications/78650860325

UR - https://www.scopus.com/pages/publications/78650860325#tab=citedBy

U2 - 10.1109/LED.2010.2089779

DO - 10.1109/LED.2010.2089779

M3 - Article

AN - SCOPUS:78650860325

SN - 0741-3106

VL - 32

SP - 69

EP - 71

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 1

M1 - 5660072

ER -

Performance enhancement of on-chip inductors with permalloy magnetic rings

Abstract

Bibliographical note

Keywords

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