Performance and reliability of MEMS coatings in liquids

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


Reliability of MEMS in liquids is an important concern for MEMS operating in harsh environments in petrochemical, biomedical, and defense applications. Our previous studies have demonstrated reliability concerns for silicon microcantilevers in liquid environments such as saline. In this paper, the effect of coatings on reliability of MEMS in liquids, such as DI water and saline, is compared to that in air. Silicon microcantilevers coated with Titanium (Ti) and SU-8 were vibrated in liquids for 108-10 9 cycles. The resonant frequency of the microcantilevers was periodically monitored to evaluate performance. Reliability of microcantilevers coated with Ti and SU-8 was compromised as indicated by a gradual decrease in resonant frequency in liquids. These changes in resonant frequency were attributed to factors such as stress-corrosion cracking, water absorption, and intrinsic stresses.

Original languageEnglish (US)
Title of host publication2008 IEEE Sensors, SENSORS 2008
Number of pages4
StatePublished - Dec 1 2008
Event2008 IEEE Sensors, SENSORS 2008 - Lecce, Italy
Duration: Oct 26 2008Oct 29 2009

Publication series

NameProceedings of IEEE Sensors


Other2008 IEEE Sensors, SENSORS 2008


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