In order to achieve higher recording density there is a need to reduce the magnetic spacing (distance between the pole piece of the write element and the top of the magnetic media). Lowering the flying height and reducing film thickness of the protecting layer including carbon overcoat and lubricant films are required. A layer of 1 nm lubricant film has almost reached the thickness of current lubricant molecules. Carbon has also met many challenges in terms of film thickness burnish process and corrosion resistance. For 100 Gb/in2 areal recording density the total thickness of protecting layer is about 3 nm. Therefore, it is imperative to make the ultrathin lubricant layer with better uniformity and optimized bonding ratio to maintain the reliability of head-disk interface.