Pattern Transfer of Sub-10 nm Features via Tin-Containing Block Copolymers

Michael J. Maher, Kazunori Mori, Stephen M. Sirard, Andrew M. Dinhobl, Christopher M. Bates, Emir Gurer, Gregory Blachut, Austin P. Lane, William J. Durand, Matthew C. Carlson, Jeffrey R. Strahan, Christopher J. Ellison, C. Grant Willson

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Chemical Compounds

Engineering & Materials Science