Abstract
The Particle Beam Mass Spectrometer is used to measure particles in the exhaust line and from within the process chamber of a parallel-plate showerhead type reactor. Experimental results indicate that the particles formed in the process chamber are spatially localized in a thin sheath between the wafer and the showerhead inlet. In addition, comparison of particle size distributions measured in the exhaust line and in the reactor show considerable particle losses in the reactor. The numerical results show that both axial and radial temperature gradients play an important role in thermophoretic particle transport. It is also shown that only a small fraction of the particles are transported to the exhaust line primarily by diffusion.
Original language | English (US) |
---|---|
Title of host publication | Institute of Environmental Sciences - Proceedings, Annual Technical Meeting |
Publisher | Inst Environ Sci Technol |
Pages | 270-277 |
Number of pages | 8 |
State | Published - 1998 |
Event | Proceedings of the 1998 44th Annual Technical Meeting - Phoenix, AZ, USA Duration: Apr 26 1998 → May 1 1998 |
Other
Other | Proceedings of the 1998 44th Annual Technical Meeting |
---|---|
City | Phoenix, AZ, USA |
Period | 4/26/98 → 5/1/98 |