Particle measurements and transport in silane LPCVD

Sandeep Nijhawan, Nagaraja P. Rao, David B. Kittelson, Peter H. McMurry, Stephen A. Campbell, John E. Brockmann, Anthony S. Geller

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

The Particle Beam Mass Spectrometer is used to measure particles in the exhaust line and from within the process chamber of a parallel-plate showerhead type reactor. Experimental results indicate that the particles formed in the process chamber are spatially localized in a thin sheath between the wafer and the showerhead inlet. In addition, comparison of particle size distributions measured in the exhaust line and in the reactor show considerable particle losses in the reactor. The numerical results show that both axial and radial temperature gradients play an important role in thermophoretic particle transport. It is also shown that only a small fraction of the particles are transported to the exhaust line primarily by diffusion.

Original languageEnglish (US)
Title of host publicationInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
PublisherInst Environ Sci Technol
Pages270-277
Number of pages8
StatePublished - 1998
EventProceedings of the 1998 44th Annual Technical Meeting - Phoenix, AZ, USA
Duration: Apr 26 1998May 1 1998

Other

OtherProceedings of the 1998 44th Annual Technical Meeting
CityPhoenix, AZ, USA
Period4/26/985/1/98

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