Particle in cell Monte Carlo collisions modeling of inductively coupled plasmas

V. A. Schweigert, U. R. Kortshagen

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Scopus citations

Abstract

A two-dimensional, axially symmetric, inductive discharge over a wide range of argon pressure and plasma density is described. The Maxwell equations for the different harmonics in the vector potential are solved using finite difference. The kinetic equations for both electrons and ions are solved using Monte Carlo approach.

Original languageEnglish (US)
Title of host publicationIEEE International Conference on Plasma Science
PublisherIEEE
Pages165
Number of pages1
StatePublished - 2000
EventICOPS 2000 - 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA
Duration: Jun 4 2000Jun 7 2000

Other

OtherICOPS 2000 - 27th IEEE International Conference on Plasma Science
CityNew Orleans, LA, USA
Period6/4/006/7/00

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