True UHV, in situ preparation of thin films of the YBa2Cu3O7-xoxide has been accomplished for the first time using a pure jet of ozone applied during the evaporation of the metal constituents. The new process has yielded films that are superconducting at 82K with a transition onset at 87K. This new method has significant potential for improving film quality. It also creates new opportunities for the insitu measurement of superconducting properties of thin film surfaces, and for the fabrication of superconducting devices.
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Acknowledgements This work was supported in part by the Air Force Office of Scientific Research under Grant 87-0372 and by the Central Administration of the University of Minnesota. The authors wish to thank J. Barnes, B. Schueler, D. Hanson, and E. Montei for their assistance. We would also like to thank J. Croening and R. Knoche for DCP-AES analysis.