Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges

Hyungsoon Im; Sang Hyun Oh

doi:10.1002/smll.201301475

Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges

Hyungsoon Im
, Sang Hyun Oh

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al ₂O₃ shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.

Original language	English (US)
Pages (from-to)	680-684
Number of pages	5
Journal	Small
Volume	10
Issue number	4
DOIs	https://doi.org/10.1002/smll.201301475
State	Published - Feb 26 2014

Keywords

atomic layer deposition
metallic pyramid
near-field optical microscopy
plasmonic nanofocusing
template stripping

Publisher link

10.1002/smll.201301475

Find It

Find It at U of M Libraries

Cite this

@article{a786f74a17e24eb98cbb5e7142b9aa34,

title = "Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges",

abstract = "Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al 2O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.",

keywords = "atomic layer deposition, metallic pyramid, near-field optical microscopy, plasmonic nanofocusing, template stripping",

author = "Hyungsoon Im and Oh, \{Sang Hyun\}",

year = "2014",

month = feb,

day = "26",

doi = "10.1002/smll.201301475",

language = "English (US)",

volume = "10",

pages = "680--684",

journal = "Small",

issn = "1613-6810",

publisher = "John Wiley and Sons Inc.",

number = "4",

}

TY - JOUR

T1 - Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges

AU - Im, Hyungsoon

AU - Oh, Sang Hyun

PY - 2014/2/26

Y1 - 2014/2/26

N2 - Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al 2O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.

AB - Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al 2O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.

KW - atomic layer deposition

KW - metallic pyramid

KW - near-field optical microscopy

KW - plasmonic nanofocusing

KW - template stripping

UR - https://www.scopus.com/pages/publications/84894270482

UR - https://www.scopus.com/pages/publications/84894270482#tab=citedBy

U2 - 10.1002/smll.201301475

DO - 10.1002/smll.201301475

M3 - Article

C2 - 24123889

AN - SCOPUS:84894270482

SN - 1613-6810

VL - 10

SP - 680

EP - 684

JO - Small

JF - Small

IS - 4

ER -

Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges

Abstract

Keywords

Publisher link

Find It

Other files and links

Fingerprint

Cite this