Oxidation sharpening, template stripping, and passivation of ultra-sharp metallic pyramids and wedges

Hyungsoon Im, Sang Hyun Oh

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al 2O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.

Original languageEnglish (US)
Pages (from-to)680-684
Number of pages5
JournalSmall
Volume10
Issue number4
DOIs
StatePublished - Feb 26 2014

Keywords

  • atomic layer deposition
  • metallic pyramid
  • near-field optical microscopy
  • plasmonic nanofocusing
  • template stripping

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