Optimizing AlF3 atomic layer deposition using trimethylaluminum and TaF5: Application to high voltage Li-ion battery cathodes

  • David H K Jackson
  • , Masihhur R. Laskar
  • , Shuyu Fang
  • , Shenzhen Xu
  • , Ryan G. Ellis
  • , Xiaoqing Li
  • , Mark Dreibelbis
  • , Susan E. Babcock
  • , Mahesh K. Mahanthappa
  • , Dane Morgan
  • , Robert J. Hamers
  • , Thomas F. Kuech

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

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Engineering

Material Science

Chemical Engineering