Optical absorption in co-deposited mixed-phase hydrogenated amorphous/nanocrystalline silicon thin films

L. R. Wienkes, A. Besaws, C. Anderson, D. C. Bobela, P. Stradins, U. Kortshagen, J. Kakalios

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


The conductivity of amorphous/nanocrystalline hydrogenated silicon thin films (a/nc-Si:H) deposited in a dual chamber co-deposition system exhibits a non-monotonic dependence on the nanocrystal concentration. Optical absorption measurements derived from the constant photocurrent method (CPM) for similarly prepared materials are reported. The optical absorption spectra, in particular the subgap absorption, are found to be independent of nanocrystalline density for relatively small crystal fractions (< 4%). For films with a higher crystalline content, the absorption spectra indicate broader Urbach slopes and higher midgap absorption. These data are interpreted in terms of a model involving electron donation from the nanocrystals into the amorphous material.

Original languageEnglish (US)
Title of host publicationAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2010
Number of pages6
StatePublished - Dec 24 2010
Event2010 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 5 2010Apr 9 2010

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Other2010 MRS Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, CA


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