On the use of dust plasma acoustic waves for the diagnostic of nanometer-sized contaminant particles in plasmas

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Abstract

During the phase of dust nucleation in plasma enhanced chemical vapor deposition systems, nanometer-sized dust particles appear in large concentrations. The dispersion characteristics of dust acoustic waves in such a plasma during the nucleation phase is analyzed. It is shown that the dispersion properties of the dust acoustic wave depend sensitively on the particle size. It is proposed to use dust acoustic waves as a novel particle size diagnostic for nanometer-sized particles.

Original languageEnglish (US)
Pages (from-to)208-210
Number of pages3
JournalApplied Physics Letters
Volume71
Issue number2
DOIs
StatePublished - Jul 14 1997

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