On the radial distribution and nonambipolarity of charged particle fluxes in a nonmagnetized planar inductively coupled plasma

Keyphrases

• Electron Current 100%
• Inductively Coupled Plasma 100%
• Impact Energy 100%
• Ion Current 100%
• Radial Distribution 100%
• Charged Particle Flux 100%
• Ion Impact 100%
• Non-conductive Material 100%
• Conductive Surface 50%
• Potential Profile 50%
• Charging Potential 50%
• Ion Flux 50%
• Ambipolar 50%
• Probe Array 50%
• Surface Charge 50%
• Radial Variation 50%
• Electron Flux 50%
• Electrostatic Probe 50%
• Ion Energy Analyzer 50%
• Conducting Walls 50%

Physics

• Charged Particle 100%
• Ion Current 100%
• Radial Distribution 100%
• Flux (Rate) 100%
• Theoretical Model 33%
• Electrostatic Probe 33%