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On the influence of excited atoms on the electron kinetics of a surface wave sustained argon plasma
A. Bohle,
U. Kortshagen
Research output
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Contribution to journal
›
Article
›
peer-review
27
Scopus citations
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Keyphrases
Argon
50%
Argon Discharge
50%
Argon Plasma
100%
Electric Field Strength
50%
Electron Distribution Function
50%
Electron Energy Distribution Function
50%
Electron Kinetics
100%
Excited Atom
100%
Langmuir Probe
50%
Population Density
100%
Self-consistent Model
50%
Spectroscopic Measurement
50%
Surface Waves
100%
Physics
Argon Plasma
100%
Distribution Function
100%
Electric Fields
50%
Electron Distribution
50%
Electron Energy
50%
Electrostatic Probe
50%
Energy Distribution
50%
Field Strength
50%
Surface Waves
100%
Engineering
Electric Field Strength
100%
Electron Distribution Function
100%
Electron Energy
100%
Energy Distribution
100%
Material Science
Density
100%
Mechanical Strength
50%