On the influence of excited atoms on the electron kinetics of a surface wave sustained argon plasma

A. Bohle, U. Kortshagen

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

Abstract

The influence of excited atoms on the characteristics of a surface wave produced argon discharge is investigated. A self-consistent model is used to determine simultaneously the electron energy distribution function, the population densities of the 4s states of argon and the maintaining electric field strength. The theoretical results are compared with spectroscopic measurements of the population densities and with Langmuir probe results for the electron distribution function.

Original languageEnglish (US)
Article number010
Pages (from-to)80-87
Number of pages8
JournalPlasma Sources Science and Technology
Volume3
Issue number1
DOIs
StatePublished - 1994
Externally publishedYes

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