On-Chip Heater Design and Control Methodology for Reliability Testing Applications Requiring Over 300C Local Temperatures

Hanzhao Yu, Yong Hyeon Yi, Nakul Pande, Chris H. Kim

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

This paper presents the design details and control methodologies for on-chip heaters that can provide fast and accurate local temperature control for reliability testing applications. The on-chip heater uses the Joule heating effect of a metal or poly line to heat the surrounding devices-under-test (DUT) to a target temperature as high as 300C. Many generations of on-chip heaters, including different heater positions, heater areas, and heater layers, have been demonstrated in technology nodes from 350nm to 16nm. To accurately operate the heater and extend the heater’s operation lifetime for long-term reliability testing, we have also developed control methodologies for precise and reliable heater control.

Original languageEnglish (US)
Pages (from-to)233-240
Number of pages8
JournalIEEE Transactions on Device and Materials Reliability
Volume23
Issue number2
DOIs
StatePublished - Jun 2023

Bibliographical note

Publisher Copyright:
© 2023 IEEE.

Keywords

  • On-chip heater
  • heater lifetime
  • reliability testing
  • reliable heater control

Fingerprint

Dive into the research topics of 'On-Chip Heater Design and Control Methodology for Reliability Testing Applications Requiring Over 300C Local Temperatures'. Together they form a unique fingerprint.

Cite this