Numerical simulation of nanoparticle transport during plasma-enhanced chemical vapor deposition

Keyphrases

• Numerical Simulation 100%
• Nanoparticle Transport 100%
• Plasma-enhanced Chemical Vapor Deposition (PECVD) 100%
• Nanoparticles 50%
• Monte Carlo Method 50%
• Particle Deposition 50%
• Momentum Transfer 50%
• Periodic Variation 50%
• Individual Nanoparticles 50%
• Plasma Properties 50%
• Fluid Model 50%
• Electrostatic Trapping 50%
• Charge-transfer Collisions 50%
• Plasma Species 50%

Material Science

• Plasma-Enhanced Chemical Vapor Deposition 100%
• Nanoparticle 100%