Numerical modeling of an RF argon-silane plasma with dust particle nucleation and growth

Keyphrases

• Numerical Modeling 100%
• Radio Frequency 100%
• Silane 100%
• Argon 100%
• Particle Growth 100%
• Particle nucleation 100%
• Dust Particles 100%
• Argon-silane Plasma 100%
• Anions 50%
• Gas Flow 50%
• Dusty Plasma 50%
• Operating Conditions 50%
• Large Particle 50%
• Potential Profile 50%
• Parallel Plates 50%
• One-dimensional numerical Model 50%
• MHz Frequency 50%
• Voltage Amplitude 50%
• Aerosol Model 50%
• Top Electrode 50%
• Nanoparticle Transport 50%
• Ion Drag 50%
• Electrode Gap 50%
• Surface Growth 50%
• One-dimensional numerical Simulation 50%
• Particle Surface 50%
• Capacitively Coupled 50%
• Plasma Potential 50%
• Two-lobe 50%
• Nucleation Growth 50%
• Plasma Fluid Model 50%
• Silicon Hydride 50%
• Chemistry Model 50%
• Coupled Phenomena 50%

Material Science

• Silane 100%
• Nucleation 100%
• Particle Growth 100%
• Particle Nucleation 100%
• Dust Particle 100%
• Silicon 33%
• Hydride 33%
• Gas Flow 33%
• Surface (Surface Science) 33%
• Nanoparticle 33%

Engineering

• Numerical Modeling 100%
• Radio Frequency 100%
• Nanoparticles 50%
• One Dimensional 50%
• Simulation Result 50%
• Gas Flow 50%
• Electrode Gap 50%
• Growth Surface 50%
• Numerical Model 50%
• Plasma Fluid Model 50%
• Parallel Plate 50%