Novel approach to form and pattern sol-gel polymethylsilsesquioxane-based spin-on glass thin and thick films

Yuxin Liu, Tianhong Cui, Ramana K. Sunkam, Philip J. Coane, Michael J. Vasile, Jost Geoettert

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

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Chemical Compounds

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