@inbook{4121b080616442dc931321e65657bddc,
title = "Nonthermal Plasma Synthesis of Silicon Nanocrystals",
keywords = "Amorphous silicon films, Background gas, Crystalline silicon, Particle nucleation, Particle size distribution, Silane plasmas",
author = "Lorenzo Mangolini and Uwe Kortshagen",
year = "2010",
month = apr,
day = "29",
doi = "10.1002/9783527629954.ch13",
language = "English (US)",
isbn = "9783527321605",
pages = "309--348",
booktitle = "Silicon Nanocrystals",
publisher = "Wiley-VCH",
}