Nonthermal Plasma Synthesis of Silicon Nanocrystals

Lorenzo Mangolini, Uwe Kortshagen

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Scopus citations
Original languageEnglish (US)
Title of host publicationSilicon Nanocrystals
Subtitle of host publicationFundamentals, Synthesis and Applications
PublisherWiley-VCH
Pages309-348
Number of pages40
ISBN (Print)9783527321605
DOIs
StatePublished - Apr 29 2010

Keywords

  • Amorphous silicon films
  • Background gas
  • Crystalline silicon
  • Particle nucleation
  • Particle size distribution
  • Silane plasmas

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