Abstract
Low-pressure plasmas are known for their ability to synthesize nanoparticles via gas-phase nucleation. While in the past this particle formation has often been considered from the viewpoint of a contamination problem in semiconductor processing, we here describe a low-pressure plasma that enables the synthesis of faceted germanium nanocrystals. The germanium nano-crystals are generally single crystals without any planar defects such as twin boundaries. A change in the morphology with particle size is observed. Small germanium particles up to about 30 nm in size are mostly cubes with (100) crystal facets. Larger crystals between 30-60 nm are primarily cuboctahedrons. Even larger nanocrystals are mainly spherical. The shape evolution is interpreted in terms of the equilibrium shape of hydrogen-coated germanium crystals. Possible applications of these crystals are discussed.
Original language | English (US) |
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Pages (from-to) | 345-350 |
Number of pages | 6 |
Journal | Chemical Vapor Deposition |
Volume | 13 |
Issue number | 6-7 |
DOIs | |
State | Published - Jul 2007 |
Keywords
- Germanium
- Nanocrystals
- Plasma
- Silicon