Nonthermal plasma synthesis of faceted germanium nanocrystals

Patrizio Cernetti, Ryan Gresback, Stephen A. Campbell, Uwe Konshagen

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


Low-pressure plasmas are known for their ability to synthesize nanoparticles via gas-phase nucleation. While in the past this particle formation has often been considered from the viewpoint of a contamination problem in semiconductor processing, we here describe a low-pressure plasma that enables the synthesis of faceted germanium nanocrystals. The germanium nano-crystals are generally single crystals without any planar defects such as twin boundaries. A change in the morphology with particle size is observed. Small germanium particles up to about 30 nm in size are mostly cubes with (100) crystal facets. Larger crystals between 30-60 nm are primarily cuboctahedrons. Even larger nanocrystals are mainly spherical. The shape evolution is interpreted in terms of the equilibrium shape of hydrogen-coated germanium crystals. Possible applications of these crystals are discussed.

Original languageEnglish (US)
Pages (from-to)345-350
Number of pages6
JournalChemical Vapor Deposition
Issue number6-7
StatePublished - Jul 2007


  • Germanium
  • Nanocrystals
  • Plasma
  • Silicon


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