TY - GEN
T1 - New process to fabricate heat assisted magnetic recording media with extremely small grain size
AU - Wang, Jianping
AU - Wang, Hao
AU - Zhao, Haibao
PY - 2012/12/1
Y1 - 2012/12/1
N2 - A new process to fabricate FePt granular media for heat assisted magnetic recording, named as Embedded Mask Pattering (EMP) process, was proposed and experimentally demonstrated. In this process, a granular hard mask layer (Ru-SiO2) was deposited on top of a L10 FePt continuous layer. The granular pattern of the mask layer was then transferred down to the FePt layer using a dry etching process. Unlike any conventional media fabrication process, in this new media fabrication process the granular structure of FePt layer is only defined by the mask layer while its magnetic properties are determined by the FePt continuous film. Since achieving good magnetic properties is separated from manipulating the granular structure for this process, the mean grain size and size distribution of FePt HAMR media can be extremely small by optimizing the mask layer and pattering transfer process, while keeping its good magnetic performances. This process is potentially compatible to today's disk media production line.
AB - A new process to fabricate FePt granular media for heat assisted magnetic recording, named as Embedded Mask Pattering (EMP) process, was proposed and experimentally demonstrated. In this process, a granular hard mask layer (Ru-SiO2) was deposited on top of a L10 FePt continuous layer. The granular pattern of the mask layer was then transferred down to the FePt layer using a dry etching process. Unlike any conventional media fabrication process, in this new media fabrication process the granular structure of FePt layer is only defined by the mask layer while its magnetic properties are determined by the FePt continuous film. Since achieving good magnetic properties is separated from manipulating the granular structure for this process, the mean grain size and size distribution of FePt HAMR media can be extremely small by optimizing the mask layer and pattering transfer process, while keeping its good magnetic performances. This process is potentially compatible to today's disk media production line.
KW - FePt
KW - embedded mask patterning (EMP)
KW - granular media
KW - hard mask
KW - heat assisted magnetic recording (HAMR)
UR - http://www.scopus.com/inward/record.url?scp=84873131755&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84873131755&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84873131755
SN - 9789810720568
T3 - 2012 Digest APMRC - Asia-Pacific Magnetic Recording Conference: A Strong Tradition. An Exciting New Look!
BT - 2012 Digest APMRC - Asia-Pacific Magnetic Recording Conference
T2 - 2012 Asia-Pacific Magnetic Recording Conference: A Strong Tradition. An Exciting New Look!, APMRC 2012
Y2 - 31 October 2012 through 2 November 2012
ER -