New method for fabricating ultra-narrow metallic wires

E. Olson; G. C. Spalding; A. M. Goldman; M. J. Rooks

doi:10.1063/1.112553

New method for fabricating ultra-narrow metallic wires

E. Olson, G. C. Spalding, A. M. Goldman, M. J. Rooks

Materials Research Science & Engineering Center

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

An improved, cryogenic shadowed evaporation technique has been developed to produce ultra-narrow metallic wires. It has been used to create wires of Pd with widths less than 15 nm and as long as 800 nm. Arrays of wires covering areas as large as 6400 μm² have been made. This method, which can be extended to other materials and structures, is presently limited by the grain size of the "template" material, and therefore holds promise for even finer linewidths.

Original language	English (US)
Pages (from-to)	2740-2742
Number of pages	3
Journal	Applied Physics Letters
Volume	65
Issue number	21
DOIs	https://doi.org/10.1063/1.112553
State	Published - 1994

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AB - An improved, cryogenic shadowed evaporation technique has been developed to produce ultra-narrow metallic wires. It has been used to create wires of Pd with widths less than 15 nm and as long as 800 nm. Arrays of wires covering areas as large as 6400 μm2 have been made. This method, which can be extended to other materials and structures, is presently limited by the grain size of the "template" material, and therefore holds promise for even finer linewidths.

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New method for fabricating ultra-narrow metallic wires

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