New Circuit Model for Rf Probe Pads and Interconnections for the Extraction of Hbt Equivalent Circuits

A new circuit model for RF probe pads and interconnections is proposed, and this new model and previous models are compared with measured S parameters of probe pad and interconnection test structures. A modified parameter extraction technique based on this new RF probe pad and interconnection model was used to determine an HBT equivalent circuit. Excellent agreement is obtained between the extracted equivalent circuit and measured HBT S parameters, while providing physically acceptable parameter values.