Fingerprint
Dive into the research topics of 'Nature of the silicon and silicon dioxide surfaces during plasma etching with fluorocarbon containing discharges'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Nature of the silicon and silicon dioxide surfaces during plasma etching with fluorocarbon containing discharges
Eray S. Aydil, Denise C. Marra
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution