Nanotrenches: An Optical Lithography Process for High-Aspect-Ratio sub-100 nm Gaps

Keyphrases

• Photonics 100%
• Nanofabrication 100%
• Optical Lithography 100%
• Lithography Process 100%
• Sub-100 Nm 100%
• High Aspect Ratio 100%
• Nanotrenches 100%
• Nanotechnology 50%
• Biotechnology 50%
• High Performance 50%
• Research Laboratories 50%
• Innovative Technique 50%
• Nanoscale Structure 50%
• Industrial Production 50%
• Submicron Scale 50%
• New Functionalities 50%
• Nanofabrication Techniques 50%
• Structured Materials 50%
• Research Production 50%
• Split Ring 50%

Engineering

• Optical Lithography 100%
• Nanofabrication Process 100%
• High Aspect Ratio 100%
• Photonics 66%
• Cutting Edge 33%
• Research Group 33%
• Application Area 33%
• Nanomaterial 33%
• Industrial Production 33%

Material Science

• Lithography 100%