Nanostructured materials production by hypersonic plasma particle deposition

N. P. Rao, H. J. Lee, M. Kelkar, D. J. Hansen, J. V.R. Heberlein, P. H. McMurry, S. L. Girshick

Research output: Contribution to journalArticlepeer-review

50 Scopus citations


We report on a new process for producing nanostructured materials, hypersonic plasma particle deposition (HPPD), wherein a thermal plasma seeded with vapor-phase precursors is supersonically expanded through a nozzle to nucleate ultrafine particles, which are then deposited by hypersonic impaction onto a temperature-controlled substrate. Results from preliminary experiments aimed at synthesizing nanostructured silicon are presented.

Original languageEnglish (US)
Pages (from-to)129-132
Number of pages4
JournalNanostructured Materials
Issue number1-8
StatePublished - 1997

Bibliographical note

Funding Information:
This work is partially supported by NSF grant CTS-9520147. from the Kangnung National University, Kangnung, Korea.


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