We report on a new process for producing nanostructured materials, hypersonic plasma particle deposition (HPPD), wherein a thermal plasma seeded with vapor-phase precursors is supersonically expanded through a nozzle to nucleate ultrafine particles, which are then deposited by hypersonic impaction onto a temperature-controlled substrate. Results from preliminary experiments aimed at synthesizing nanostructured silicon are presented.
|Original language||English (US)|
|Number of pages||4|
|State||Published - 1997|
Bibliographical noteFunding Information:
This work is partially supported by NSF grant CTS-9520147. from the Kangnung National University, Kangnung, Korea.