Nanostructured materials production by hypersonic plasma particle deposition

N. P. Rao; H. J. Lee; M. Kelkar; D. J. Hansen; J. V.R. Heberlein; P. H. McMurry; S. L. Girshick

doi:10.1016/S0965-9773(97)00035-4

Nanostructured materials production by hypersonic plasma particle deposition

N. P. Rao, H. J. Lee, M. Kelkar, D. J. Hansen, J. V.R. Heberlein, P. H. McMurry, S. L. Girshick

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

50 Scopus citations

Abstract

We report on a new process for producing nanostructured materials, hypersonic plasma particle deposition (HPPD), wherein a thermal plasma seeded with vapor-phase precursors is supersonically expanded through a nozzle to nucleate ultrafine particles, which are then deposited by hypersonic impaction onto a temperature-controlled substrate. Results from preliminary experiments aimed at synthesizing nanostructured silicon are presented.

Original language	English (US)
Pages (from-to)	129-132
Number of pages	4
Journal	Nanostructured Materials
Volume	9
Issue number	1-8
DOIs	https://doi.org/10.1016/S0965-9773(97)00035-4
State	Published - 1997

Bibliographical note

Funding Information:
This work is partially supported by NSF grant CTS-9520147. from the Kangnung National University, Kangnung, Korea.

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10.1016/S0965-9773(97)00035-4

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title = "Nanostructured materials production by hypersonic plasma particle deposition",

abstract = "We report on a new process for producing nanostructured materials, hypersonic plasma particle deposition (HPPD), wherein a thermal plasma seeded with vapor-phase precursors is supersonically expanded through a nozzle to nucleate ultrafine particles, which are then deposited by hypersonic impaction onto a temperature-controlled substrate. Results from preliminary experiments aimed at synthesizing nanostructured silicon are presented.",

author = "Rao, {N. P.} and Lee, {H. J.} and M. Kelkar and Hansen, {D. J.} and Heberlein, {J. V.R.} and McMurry, {P. H.} and Girshick, {S. L.}",

note = "Funding Information: This work is partially supported by NSF grant CTS-9520147. from the Kangnung National University, Kangnung, Korea.",

year = "1997",

doi = "10.1016/S0965-9773(97)00035-4",

language = "English (US)",

volume = "9",

pages = "129--132",

journal = "Nanostructured Materials",

issn = "0965-9773",

publisher = "Pergamon Press Ltd.",

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TY - JOUR

T1 - Nanostructured materials production by hypersonic plasma particle deposition

AU - Rao, N. P.

AU - Lee, H. J.

AU - Kelkar, M.

AU - Hansen, D. J.

AU - Heberlein, J. V.R.

AU - McMurry, P. H.

AU - Girshick, S. L.

N1 - Funding Information: This work is partially supported by NSF grant CTS-9520147. from the Kangnung National University, Kangnung, Korea.

PY - 1997

Y1 - 1997

N2 - We report on a new process for producing nanostructured materials, hypersonic plasma particle deposition (HPPD), wherein a thermal plasma seeded with vapor-phase precursors is supersonically expanded through a nozzle to nucleate ultrafine particles, which are then deposited by hypersonic impaction onto a temperature-controlled substrate. Results from preliminary experiments aimed at synthesizing nanostructured silicon are presented.

AB - We report on a new process for producing nanostructured materials, hypersonic plasma particle deposition (HPPD), wherein a thermal plasma seeded with vapor-phase precursors is supersonically expanded through a nozzle to nucleate ultrafine particles, which are then deposited by hypersonic impaction onto a temperature-controlled substrate. Results from preliminary experiments aimed at synthesizing nanostructured silicon are presented.

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U2 - 10.1016/S0965-9773(97)00035-4

DO - 10.1016/S0965-9773(97)00035-4

M3 - Article

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SN - 0965-9773

VL - 9

SP - 129

EP - 132

JO - Nanostructured Materials

JF - Nanostructured Materials

IS - 1-8

ER -

Nanostructured materials production by hypersonic plasma particle deposition

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