Nanoelectromechanical resonator arrays for ultrafast, gas-phase chromatographic chemical analysis

Mo Li, E. B. Myers, H. X. Tang, S. J. Aldridge, H. C. McCaig, J. J. Whiting, R. J. Simonson, N. S. Lewis, M. L. Roukes

Research output: Contribution to journalArticlepeer-review

132 Scopus citations

Abstract

Miniaturized gas chromatography (GC) systems can provide fast, quantitative analysis of chemical vapors in an ultrasmall package. We describe a chemical sensor technology based on resonant nanoelectromechanical systems (NEMS) mass detectors that provides the speed, sensitivity, specificity, and size required by the microscale GC paradigm. Such NEMS sensors have demonstrated detection of subparts per billion (ppb) concentrations of a phosphonate analyte. By combining two channels of NEMS detection with an ultrafast GC front-end, chromatographic analysis of 13 chemicals was performed within a 5 s time window.

Original languageEnglish (US)
Pages (from-to)3899-3903
Number of pages5
JournalNano letters
Volume10
Issue number10
DOIs
StatePublished - Oct 13 2010

Keywords

  • NEMS
  • gas chromatography
  • gas detectors
  • mass sensing

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