Nano self-assembly for MEMS and microelectronics applications (invited paper)

Engineering

• Applications 100%
• Assembly 100%
• Microelectromechanical System 100%
• Nanoparticles 33%
• Polymer 33%
• Thin Films 33%
• Field-Effect Transistor 33%
• Actuation 33%
• Silica Nanoparticle 33%
• Dielectric Layer 33%
• Actuators 16%
• Tunneling 16%
• Active Layer 16%
• Magnetic Thin Films 16%
• Surface Micro-Machining 16%
• Assembled Film 16%

Material Science

• Paper 100%
• Self Assembly 100%
• Microelectronics 100%
• Sensor 66%
• Polymer 33%
• Thin Films 33%
• Dielectric Material 33%
• Field Effect Transistors 33%
• Surface 16%
• Devices 16%
• Metal 16%
• Magnetic Thin Films 16%
• Actuator 16%
• Micromachining 16%