Multi-mode noise analysis of cantilevers for scanning probe microscopy

M. V. Salapaka, H. S. Bergh, J. Lai, A. Majumdar, E. McFarland

Research output: Contribution to journalArticlepeer-review

128 Scopus citations


A multi-mode analysis of micro-cantilever dynamics is presented. We derive the power spectral density of the cantilever displacement due to a thermal noise source and predict the cantilevers's fundamental resonant frequency and higher harmonics. The first mode in the multi-mode model is equivalent to the traditional single-mode model. Experimental results obtained with a silicon nitride cantilever at 300 K are in excellent qualitative agreement with the multi-mode model. The multi-mode model may be used to obtain accurate values of the cantilever properties such as the elastic modulus, effective mass, thickness and moment of inertia.

Original languageEnglish (US)
Pages (from-to)2480-2487
Number of pages8
JournalJournal of Applied Physics
Issue number6
StatePublished - Mar 15 1997


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